HP-R1015 pressure regulating valve | 一般工业机械

原能工业有限公司

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HP-R1015 pressure regulating valve

生产所需时间:

10 日

运送方式:

AIR

是否可订造:

可以

型号编号:

HP-R1015

Applications:

The HP-R1015 pressure regulating valve is suitable for high-purity gases and adopts a stainless steel structure with a diaphragm type hard seal design.

描述

联络供应商

The HP-R1015 pressure regulating valve is suitable for high-purity gases and adopts a stainless steel structure with a diaphragm type hard seal design. The internal flow channel is electrolytic polished, and the output pressure is stable, meeting the requirements of large-scale integrated circuits. This product complies with SEMI and ASTM standards.

PARAMETERS:

流量系数（Cv） Flow coefficient Cv	0.09
出口工作压力 Outlet pressure	5psig～150psig（0.34bar～10bar）
工作温度 Temperature range	-25℃～65℃
泄漏率（氦气） Leak rate(helium)	内部internal：≤2×10^-10Pa·m³/s 外部external：≤2×10^-9Pa·m³/s
端口连接 Connections	UNF、焊接Welding
最大进口压力 Max.inlet pressure	3500 psig（241bar）

MEDIUM WETTED MATERIALS:

阀体 Body materials：SUS316L/316L vim+var

膜片 Diaphragm：316L/哈氏合金 Hastelloy

阀座 Seat disc：PCTFE/PFA/PI

OTHER:

采用去离子水进行超声波清洗，装配、包装均在百级洁净室内完成。Ultrasonic cleaning is carried out using deionized water, and assembly and packaging are completed in a Class 100 clean room.