This main configuration for coating machines comes with a robust vacuum room. The SUS304 stainless steel material is durable and easy to maintain. This main configuration with a unique 16-shaft feature is easy to adjust.

• Water-cooling chamber.
• 2 vacuum units.
• Roughing pump: 70L/s.
• Roots pump: 300L/s.
• Molecular pump: 1,600L/s.
• Valve: bypass valve within, automatic interlock, adjustable pumping speed.
• 3 power supplies.
• Pulsed bias power supply: SP power, 30kW.
• Medium frequency power supply: SP power, 40kW.
• Arc ion power supply: DC 160A.
• DC power supply: SP power, 10kW.
• Cylinder target: 70 x 830mm.
• Single direction magnetron.
• Arc ion target: 95 x 40mm, pneumatic-drive arc striking.
• Planar target: DC magnetron sputtering target.