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The DN3 vacuum diaphragm valve is suitable for high-purity gases such as HF etc., with a three-way structure. The valve body is made of T2 die forgings or stainless steel forgings, and sealed with metal bellows; The internal flow channels are all machined, with stable and reliable performance, and easy operation.
PARAMETERS:
| Inlet type | M18 |
| Working pressure | 0.98MPa |
| Flow coefficient Cv | 0.29 |
| Temperature range | -25℃~80℃ |
| Leak rate | internal:<1×10-10Pa·m3/s external:<1×10-10Pa·m3/s |
| Pneumatic actuator working presure | 0.4MPa~0.7MPa |
| Life time | 100 thousand |
MEDIUM WETTED MATERIALS:
Body materials:SUS316LE/316L vim+var
Seat disc:PCTFE/PI/PFA
CLEANING PROCESS:
BA: Mechanical grinding, roughness Ra ≤ 0.25 μ m, degreasing cleaning+precision cleaning.
EP: mechanical grinding+electrolytic grinding, roughness Ra ≤ 0.13 μ m, degreasing cleaning+precision cleaning, double-layer packaging.