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The DN3 vacuum needle valve is suitable for high-purity gases such as HF etc., with a three-way structure. The valve body is made of T2 die forgings or stainless steel forgings, and sealed with metal bellows; The internal flow channels are all machined, with stable and reliable performance, and easy operation.
PARAMETERS:
| Model | DN3 |
| Seat diameter size | 3mm |
| Max. working pressure | 0.1 MPa |
| Temperature range | -30℃~100℃ |
| Vacuum degree | 1×10-3mmHg |
| Leak rate | internal:<1.33×10-5Pa·L/s external:<1.33×10-6Pa·L/s |
MAIN COMPONENT MARERIALS:
T2/321
OPTIONS:
Electrochemical polishing
Cleanroom assembly (Class 100 cleanroom)