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The HP-D4, HP-D8 diaphragm valve is suitable for high-purity gas media used in semiconductors. The valve body adopts an integrated structure, which minimizes the number of driving components, simplifies the structure, and can be used continuously for a long time, accurately meeting customer needs. This product complies with SEMI and ASTM standards.
PARAMETERS:
| Model | HP-D4 | HP-D8 |
| Inlet type | 1/4"VCR | 1/2"VCR |
| Working pressure | 0.98MPa | |
| Flow coefficient Cv | 0.29 | 0.7 |
| Temperature range | -10℃~80℃ | |
| Leak rate | internal:<1×10-10Pa·m3/s external:<1×10-10Pa·m3/s | |
| Pneumatic actuator working pressure | 0.4MPa~0.7MPa | |
| Life time | Manual: 100 thousand Pneumatic: 4 million | |
MAIN COMPONENT MARERIALS:
Body materials:SUS316LE/316L vim+var/ Hastelloy
Seat disc:PCTFE/PI/PFA
CLEANING PROCESS:
BA class: Mechanical grinding, roughness Ra ≤ 0.25 μ m, degreasing cleaning+precision cleaning.
EP class: mechanical grinding+electrolytic grinding, roughness Ra ≤ 0.13 μ m, degreasing cleaning+precision cleaning, double-layer packaging.