Shenzhen Tiancheng Vacuum Technology Co., Ltd
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Main Configuration for Coating Machine
Description
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Description
This main configuration for coating machines is made of top-quality SUS304 stainless steel material with a water-cooling chamber. The single-headed heating tube is easy to maintain and replace for added endurance. This main configuration with 4 targets also has 3 power supplies.
- With a vacuum room.
- Heating tube: single head 18 x 930mm, 220V, 9 x 2kW.
- Roughing pump: 70L/s.
- Roots pump: 300L/s.
- Holding pump: 90-108m3/h.
- Molecular pump: 3,500L/s.
- Valve: bypass valve within, automatic interlock, adjustable pumping speed.
- Pulsed bias power supply: SP power, 30kW.
- Medium frequency power supply: SP power, 40kW.
- Cylinder target: 70 x 930mm, single direction magnetron.
- Arc ion power supply: DC 160A.
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Supplier info last updated: 7 Mar 2013
Advertise since: 1 Jul 2011
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