This main configuration for coating machines comes with 2 durable vacuum units for stable performance. The SUS304 stainless steel tube with a water-cooling chamber is efficient and safe to use. This main configuration with a 16-shaft turntable is also easy to adjust and operate.

• Roughing pump: 70L/s.
• Roots pump: 300L/s.
• Holding pump: 70L/s.
• Molecular pump: 3,500L/s.
• 3 power supplies.
• Pulsed bias power supply: SP power, 30kW.
• Medium frequency power supply: SP power, 40kW.
• Arc ion power supply: DC 160A.
• Cylinder target: 70 x 1080mm, single direction magnetron.
• Arc ion target: 95 x 40mm, pneumatic-drive arc striking.