Shenzhen Tiancheng Vacuum Technology Co., Ltd
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Main Configuration for Coating Machines
Description
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Description
This main configuration for coating machines comes with a robust vacuum room. The SUS304 stainless steel material is durable and easy to maintain. This main configuration with a unique 16-shaft feature is easy to adjust.
- Water-cooling chamber.
- 2 vacuum units.
- Roughing pump: 70L/s.
- Roots pump: 300L/s.
- Molecular pump: 1,600L/s.
- Valve: bypass valve within, automatic interlock, adjustable pumping speed.
- 3 power supplies.
- Pulsed bias power supply: SP power, 30kW.
- Medium frequency power supply: SP power, 40kW.
- Arc ion power supply: DC 160A.
- DC power supply: SP power, 10kW.
- Cylinder target: 70 x 830mm.
- Single direction magnetron.
- Arc ion target: 95 x 40mm, pneumatic-drive arc striking.
- Planar target: DC magnetron sputtering target.
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Supplier info last updated: 7 Mar 2013
Advertise since: 1 Jul 2011
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