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HP-R1015 pressure regulating valve
生產所需時間:
10 日
運送方式:
AIR
是否可訂造:
可以
型號編號:
HP-R1015
Applications:
The HP-R1015 pressure regulating valve is suitable for high-purity gases and adopts a stainless steel structure with a diaphragm type hard seal design.
描述
聯絡供應商
描述
The HP-R1015 pressure regulating valve is suitable for high-purity gases and adopts a stainless steel structure with a diaphragm type hard seal design. The internal flow channel is electrolytic polished, and the output pressure is stable, meeting the requirements of large-scale integrated circuits. This product complies with SEMI and ASTM standards.
PARAMETERS:
流量系数（Cv） Flow coefficient Cv | 0.09 |
出口工作压力 Outlet pressure | 5psig～150psig（0.34bar～10bar） |
工作温度 Temperature range | -25℃～65℃ |
泄漏率（氦气） Leak rate(helium) | 内部internal：≤2×10-10Pa·m3/s 外部external：≤2×10-9Pa·m3/s |
端口连接 Connections | UNF、焊接Welding |
最大进口压力 Max.inlet pressure | 3500 psig（241bar） |
MEDIUM WETTED MATERIALS:
阀 体 Body materials：SUS316L/316L vim+var
膜 片 Diaphragm：316L/哈氏合金 Hastelloy
阀 座 Seat disc：PCTFE/PFA/PI
OTHER:
采用去离子水进行超声波清洗，装配、包装均在百级洁净室内完成。Ultrasonic cleaning is carried out using deionized water, and assembly and packaging are completed in a Class 100 clean room.
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