This in-line LEOS system offers connection of various mass production devices with a tester, such as a sorter, prober and handler. It also provides concurrent measurement of optical and electric properties in the LED mass production line.

• Edge detection with S/W.
• Ink marking.
• Rapid measuring speed : 0.3sec/sample.
• Correction, storage, and editing of measuring condition.
• Simple and convenient station operation and wafer alignment.
• Ranking and mapping of measurement data by users' grade setting.
• Statistical processing and storing of measured results.
• Compatibility of measured data.
• Providing optimum users' interface for mass production, quality control and research.