This main configuration for coating machines is made of top-quality SUS304 stainless steel material with a water-cooling chamber. The single-headed heating tube is easy to maintain and replace for added endurance. This main configuration with 4 targets also has 3 power supplies.

• With a vacuum room.
• Heating tube: single head 18 x 930mm, 220V, 9 x 2kW.
• Roughing pump: 70L/s.
• Roots pump: 300L/s.
• Holding pump: 90-108m3/h.
• Molecular pump: 3,500L/s.
• Valve: bypass valve within, automatic interlock, adjustable pumping speed.
• Pulsed bias power supply: SP power, 30kW.
• Medium frequency power supply: SP power, 40kW.
• Cylinder target: 70 x 930mm, single direction magnetron.
• Arc ion power supply: DC 160A.